Integration of microfluidic and microoptical elements using a single-mask photolithographic step

TitleIntegration of microfluidic and microoptical elements using a single-mask photolithographic step
Publication TypeJournal Article
Year of Publication2004
AuthorsLeeds, AR, Van Keuren, ER, Durst, ME, Schneider, TW, Currie, JF, Paranjape, M
JournalSensors and Actuators A: Physical
Volume115
Issue2-3
Pagination571 - 580
Date Published9/2004
ISSN09244247
DOI10.1016/j.sna.2004.03.052
Short TitleSensors and Actuators A: Physical
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